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Bibliographic data

Indications of the International Patent Classification (IPC)
(51)	INT.CL.	G03F 1/00
		G03F 1/26
		G03F 1/30
		G03F 1/54
		G03F 1/46

European patent
(11)	Number of the document	2881790
(13)	Kind of document	T
(96)	European patent application number	14196008.8
	Date of filing the European patent application	2014-12-03
(97)	Date of publication of the European application	2015-06-10
(45)	Date of publication and mention of the grant of the patent	2019-06-19
(46)	Date of publication of the claims translation

Priority applications
(30)	Number	Date	Country code
	2013253239	2013-12-06	JP

Inventors
(72)	Sasamoto, Kouhei, JP Inazuki, Yukio, JP Fukaya, Souichi, JP Nakagawa, Hideo, JP Kaneko, Hideo, JP

Grantee
(73)	Shin-Etsu Chemical Co., Ltd., 6-1, Ohtemachi 2-chome Chiyoda-ku, Tokyo, JP

Title
(54)	Photomask blank
	Photomask blank