LT - CONTAINER FOR ORGANIC TREATMENT SOLUTION FOR PATTERNING OF CHEMICALLY AMPLIFIED RESIST FILM, PATTERN FORMATION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
EN - CONTAINER FOR ORGANIC TREATMENT SOLUTION FOR PATTERNING OF CHEMICALLY AMPLIFIED RESIST FILM, PATTERN FORMATION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
Legal status
Patent not validated
Bibliographic data
Indications of the International Patent Classification (IPC)
| (51) |
INT.CL. |
G03F 7/30 |
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G03F 7/32 |
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G03F 7/038 |
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G03F 7/039 |
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B65D 81/24 |
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H01L 21/027 |
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European patent
| (11) |
Number of the document |
2927749 |
| (13) |
Kind of document |
T |
| (96) |
European patent application number |
13851077.1 |
|
Date of filing the European patent application |
2013-10-17 |
| (97) |
Date of publication of the European application |
2015-10-07 |
| (45) |
Date of publication and mention of the grant of the patent |
2019-12-11
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| (46) |
Date of publication of the claims translation |
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PCT application
| (86) |
Number |
PCT/JP2013/078211 |
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Date |
2013-10-17 |
PCT application publication
| (87) |
Number |
WO 2014/069245 |
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Date |
2014-05-08 |
Priority applications
| (30) |
Number |
Date |
Country code |
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2012240752 |
2012-10-31
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JP |
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2013031277 |
2013-02-20
|
JP |
Inventors
| (72) |
YAMANAKA, Tsukasa, JP
KAWAMOTO, Takashi, JP
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Grantee
| (73) |
FUJIFILM Corporation,
26-30, Nishiazabu 2-chome Minato-ku, Tokyo 106-8620,
JP
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Title
| (54) |
CONTAINER FOR ORGANIC TREATMENT SOLUTION FOR PATTERNING OF CHEMICALLY AMPLIFIED RESIST FILM, PATTERN FORMATION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE |
| |
CONTAINER FOR ORGANIC TREATMENT SOLUTION FOR PATTERNING OF CHEMICALLY AMPLIFIED RESIST FILM, PATTERN FORMATION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE |
