LT - CONTAINER FOR ORGANIC TREATMENT SOLUTION FOR PATTERNING OF CHEMICALLY AMPLIFIED RESIST FILM, PATTERN FORMATION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
EN - CONTAINER FOR ORGANIC TREATMENT SOLUTION FOR PATTERNING OF CHEMICALLY AMPLIFIED RESIST FILM, PATTERN FORMATION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
Bibliografiniai duomenys
Tarptautinės patentų klasifikacijos indeksai (TPK)
| (51) |
INT.CL. |
G03F 7/30 |
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G03F 7/32 |
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G03F 7/038 |
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G03F 7/039 |
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B65D 81/24 |
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H01L 21/027 |
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Europos patentas
| (11) |
Patento numeris |
2927749 |
| (13) |
Dokumento rūšis |
T |
| (96) |
Europos patento paraiškos numeris |
13851077.1 |
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Europos patento paraiškos padavimo data |
2013-10-17 |
| (97) |
Europos patento paraiškos paskelbimo data |
2015-10-07 |
| (45) |
Paskelbimo apie Europos patento išdavimą data |
2019-12-11
|
| (46) |
Apibrėžties vertimo paskelbimo data |
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Tarptautinės paraiškos padavimo
| (86) |
Numeris |
PCT/JP2013/078211 |
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Data |
2013-10-17 |
Tarptautinės paraiškos paskelbimo
| (87) |
Numeris |
WO 2014/069245 |
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Data |
2014-05-08 |
Prioriteto paraiškos
| (30) |
Numeris |
Data |
Šalis |
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2012240752 |
2012-10-31
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JP |
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2013031277 |
2013-02-20
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JP |
Išradėjai
| (72) |
YAMANAKA, Tsukasa, JP
KAWAMOTO, Takashi, JP
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Savininkas
| (73) |
FUJIFILM Corporation,
26-30, Nishiazabu 2-chome Minato-ku, Tokyo 106-8620,
JP
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Pavadinimas
| (54) |
CONTAINER FOR ORGANIC TREATMENT SOLUTION FOR PATTERNING OF CHEMICALLY AMPLIFIED RESIST FILM, PATTERN FORMATION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE |
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CONTAINER FOR ORGANIC TREATMENT SOLUTION FOR PATTERNING OF CHEMICALLY AMPLIFIED RESIST FILM, PATTERN FORMATION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE |
