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Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/677 | |
| H01L 51/56 | |||
| B41J 29/13 | |||
| B41J 29/02 |
| (11) | Number of the document | 2973676 |
| (13) | Kind of document | T |
| (96) | European patent application number | 14779907.6 |
| Date of filing the European patent application | 2014-03-11 | |
| (97) | Date of publication of the European application | 2016-01-20 |
| (45) | Date of publication and mention of the grant of the patent | 2018-11-28 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2014/023820 |
| Date | 2014-03-11 |
| (87) | Number | WO 2014/164932 |
| Date | 2014-10-09 |
| (30) | Number | Date | Country code |
| 201313802304 | 2013-03-13 | US |
| (72) |
MAUCK, Justin, US
KO, Alexander Sou-Kang, US
VRONSKY, Eliyahu, US
ALDERSON, Shandon, US
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| (73) |
Kateeva, Inc.,
7015 Gateway Boulevard, Newark, CA 94560,
US
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| (54) | GAS ENCLOSURE SYSTEMS AND METHODS UTILIZING AN AUXILIARY ENCLOSURE |
| GAS ENCLOSURE SYSTEMS AND METHODS UTILIZING AN AUXILIARY ENCLOSURE |