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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01L 21/677 | |
| H01L 51/56 | |||
| B41J 29/13 | |||
| B41J 29/02 |
| (11) | Patento numeris | 2973676 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 14779907.6 |
| Europos patento paraiškos padavimo data | 2014-03-11 | |
| (97) | Europos patento paraiškos paskelbimo data | 2016-01-20 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2018-11-28 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2014/023820 |
| Data | 2014-03-11 |
| (87) | Numeris | WO 2014/164932 |
| Data | 2014-10-09 |
| (30) | Numeris | Data | Šalis |
| 201313802304 | 2013-03-13 | US |
| (72) |
MAUCK, Justin, US
KO, Alexander Sou-Kang, US
VRONSKY, Eliyahu, US
ALDERSON, Shandon, US
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| (73) |
Kateeva, Inc.,
7015 Gateway Boulevard, Newark, CA 94560,
US
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| (54) | GAS ENCLOSURE SYSTEMS AND METHODS UTILIZING AN AUXILIARY ENCLOSURE |
| GAS ENCLOSURE SYSTEMS AND METHODS UTILIZING AN AUXILIARY ENCLOSURE |