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Legal status
Patent not validated
| (51) | INT.CL. | C23C 14/34 | |
| H01J 37/34 |
| (11) | Number of the document | 3033440 |
| (13) | Kind of document | T |
| (96) | European patent application number | 14835827.8 |
| Date of filing the European patent application | 2014-08-14 | |
| (97) | Date of publication of the European application | 2016-06-22 |
| (45) | Date of publication and mention of the grant of the patent | 2021-04-21 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2014/050539 |
| Date | 2014-08-14 |
| (87) | Number | WO 2015/023585 |
| Date | 2015-02-19 |
| (30) | Number | Date | Country code |
| 201361866006 P | 2013-08-14 | US |
| (72) |
WEST, Brian T., US
COX, Michael S., US
OH, Jeonghoon, US
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| (73) |
Applied Materials, Inc.,
3050 Bowers Avenue, Santa Clara, California 95054,
US
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| (54) | SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES |
| SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES |