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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | C23C 14/34 | |
| H01J 37/34 |
| (11) | Patento numeris | 3033440 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 14835827.8 |
| Europos patento paraiškos padavimo data | 2014-08-14 | |
| (97) | Europos patento paraiškos paskelbimo data | 2016-06-22 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2021-04-21 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2014/050539 |
| Data | 2014-08-14 |
| (87) | Numeris | WO 2015/023585 |
| Data | 2015-02-19 |
| (30) | Numeris | Data | Šalis |
| 201361866006 P | 2013-08-14 | US |
| (72) |
WEST, Brian T., US
COX, Michael S., US
OH, Jeonghoon, US
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| (73) |
Applied Materials, Inc.,
3050 Bowers Avenue, Santa Clara, California 95054,
US
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| (54) | SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES |
| SPUTTERING TARGET WITH BACKSIDE COOLING GROOVES |