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Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/027 | (2006.01) |
| G03F 7/70641 | (2013.01) | ||
| G03F 7/20 | (2006.01) |
| (11) | Number of the document | 3033764 |
| (13) | Kind of document | T |
| (96) | European patent application number | 14836059.7 |
| Date of filing the European patent application | 2014-08-08 | |
| (97) | Date of publication of the European application | 2016-06-22 |
| (45) | Date of publication and mention of the grant of the patent | 2021-10-06 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2014/050390 |
| Date | 2014-08-08 |
| (87) | Number | WO 2015/023542 |
| Date | 2015-02-19 |
| (30) | Number | Date | Country code |
| 201361864527 P | 2013-08-10 | US | |
| 201414451320 | 2014-08-04 | US |
| (72) |
PANDEV, Stillian Ivanov , US
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| (73) |
KLA - Tencor Corporation ,
One Technology Drive, Milpitas, California 95035,
US
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| (54) | METHODS AND APPARATUS FOR DETERMINING FOCUS |
| METHODS AND APPARATUS FOR DETERMINING FOCUS |