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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01L 21/027 | (2006.01) |
| G03F 7/70641 | (2013.01) | ||
| G03F 7/20 | (2006.01) |
| (11) | Patento numeris | 3033764 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 14836059.7 |
| Europos patento paraiškos padavimo data | 2014-08-08 | |
| (97) | Europos patento paraiškos paskelbimo data | 2016-06-22 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2021-10-06 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2014/050390 |
| Data | 2014-08-08 |
| (87) | Numeris | WO 2015/023542 |
| Data | 2015-02-19 |
| (30) | Numeris | Data | Šalis |
| 201361864527 P | 2013-08-10 | US | |
| 201414451320 | 2014-08-04 | US |
| (72) |
PANDEV, Stillian Ivanov , US
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| (73) |
KLA - Tencor Corporation ,
One Technology Drive, Milpitas, California 95035,
US
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| (54) | METHODS AND APPARATUS FOR DETERMINING FOCUS |
| METHODS AND APPARATUS FOR DETERMINING FOCUS |