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LT - STABLE METAL COMPOUNDS AS HARDMASKS AND FILLING MATERIALS, THEIR COMPOSITIONS AND METHODS OF USE
EN - STABLE METAL COMPOUNDS AS HARDMASKS AND FILLING MATERIALS, THEIR COMPOSITIONS AND METHODS OF USE

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Patent not validated

Bibliographic data
Indications of the International Patent Classification (IPC)
(51) INT.CL. G03F 7/09
H01L 21/027
C08G 77/58
C08G 79/00
European patent
(11) Number of the document 3039484
(13) Kind of document T
(96) European patent application number 14752886.3
Date of filing the European patent application 2014-08-20
(97) Date of publication of the European application 2016-07-06
(45) Date of publication and mention of the grant of the patent 2018-07-18
(46) Date of publication of the claims translation
PCT application
(86) Number PCT/EP2014/067749
Date 2014-08-20
PCT application publication
(87) Number WO 2015/028371
Date 2015-03-05
Priority applications
(30) Number Date Country code
201314015222 2013-08-30 US
Inventors
(72)
YAO, Huirong, US
MULLEN, Salem K., US
WOLFER, Elizabeth, US
MCKENZIE, Douglas, US
CHO, JoonYeon, US
PADMANABAN, Munirathna, US
Grantee
(73) AZ Electronic Materials (Luxembourg) S.ą.r.l., 46 Place Guillaume ll, 1648 Luxembourg, LU
Title
(54) STABLE METAL COMPOUNDS AS HARDMASKS AND FILLING MATERIALS, THEIR COMPOSITIONS AND METHODS OF USE
  STABLE METAL COMPOUNDS AS HARDMASKS AND FILLING MATERIALS, THEIR COMPOSITIONS AND METHODS OF USE
Last update date 2021-04-30