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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | G03F 7/09 | |
| H01L 21/027 | |||
| C08G 77/58 | |||
| C08G 79/00 |
| (11) | Patento numeris | 3039484 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 14752886.3 |
| Europos patento paraiškos padavimo data | 2014-08-20 | |
| (97) | Europos patento paraiškos paskelbimo data | 2016-07-06 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2018-07-18 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/EP2014/067749 |
| Data | 2014-08-20 |
| (87) | Numeris | WO 2015/028371 |
| Data | 2015-03-05 |
| (30) | Numeris | Data | Šalis |
| 201314015222 | 2013-08-30 | US |
| (72) |
YAO, Huirong, US
MULLEN, Salem K., US
WOLFER, Elizabeth, US
MCKENZIE, Douglas, US
CHO, JoonYeon, US
PADMANABAN, Munirathna, US
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| (73) |
AZ Electronic Materials (Luxembourg) S.ą.r.l.,
46 Place Guillaume ll, 1648 Luxembourg,
LU
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| (54) | STABLE METAL COMPOUNDS AS HARDMASKS AND FILLING MATERIALS, THEIR COMPOSITIONS AND METHODS OF USE |
| STABLE METAL COMPOUNDS AS HARDMASKS AND FILLING MATERIALS, THEIR COMPOSITIONS AND METHODS OF USE |