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Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/311 | |
| C11D 3/00 | |||
| C11D 7/32 | |||
| C11D 7/50 | |||
| C11D 11/00 | |||
| G03F 7/42 |
| (11) | Number of the document | 3060642 |
| (13) | Kind of document | T |
| (96) | European patent application number | 14855311.8 |
| Date of filing the European patent application | 2014-09-15 | |
| (97) | Date of publication of the European application | 2016-08-31 |
| (45) | Date of publication and mention of the grant of the patent | 2019-11-06 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2014/055556 |
| Date | 2014-09-15 |
| (87) | Number | WO 2015/060954 |
| Date | 2015-04-30 |
| (30) | Number | Date | Country code |
| 201361893424 P | 2013-10-21 | US |
| (72) |
DORY, Thomas, US
DU, Bing, US
TAKAHASHI, Tomonori, US
KNEER, Emil A., US
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| (73) |
FujiFilm Electronic Materials USA, Inc.,
80 Circuit Drive, North Kingstown, RI 02852,
US
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| (54) | CLEANING FORMULATIONS FOR REMOVING RESIDUES ON SURFACES |
| CLEANING FORMULATIONS FOR REMOVING RESIDUES ON SURFACES |