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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01L 21/311 | |
| C11D 3/00 | |||
| C11D 7/32 | |||
| C11D 7/50 | |||
| C11D 11/00 | |||
| G03F 7/42 |
| (11) | Patento numeris | 3060642 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 14855311.8 |
| Europos patento paraiškos padavimo data | 2014-09-15 | |
| (97) | Europos patento paraiškos paskelbimo data | 2016-08-31 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2019-11-06 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2014/055556 |
| Data | 2014-09-15 |
| (87) | Numeris | WO 2015/060954 |
| Data | 2015-04-30 |
| (30) | Numeris | Data | Šalis |
| 201361893424 P | 2013-10-21 | US |
| (72) |
DORY, Thomas, US
DU, Bing, US
TAKAHASHI, Tomonori, US
KNEER, Emil A., US
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| (73) |
FujiFilm Electronic Materials USA, Inc.,
80 Circuit Drive, North Kingstown, RI 02852,
US
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| (54) | CLEANING FORMULATIONS FOR REMOVING RESIDUES ON SURFACES |
| CLEANING FORMULATIONS FOR REMOVING RESIDUES ON SURFACES |