LT - HIGH-PURITY FLUORINATED HYDROCARBON, USE AS A PLASMA ETCHING GAS, AND PLASMA ETCHING METHOD
EN - HIGH-PURITY FLUORINATED HYDROCARBON, USE AS A PLASMA ETCHING GAS, AND PLASMA ETCHING METHOD
Legal status
Patent not validated
Bibliographic data
Indications of the International Patent Classification (IPC)
| (51) |
INT.CL. |
C07C 19/08 |
|
|
|
H01J 37/32 |
|
European patent
| (11) |
Number of the document |
3064483 |
| (13) |
Kind of document |
T |
| (96) |
European patent application number |
14858176.2 |
|
Date of filing the European patent application |
2014-10-28 |
| (97) |
Date of publication of the European application |
2016-09-07 |
| (45) |
Date of publication and mention of the grant of the patent |
2019-05-01
|
| (46) |
Date of publication of the claims translation |
|
PCT application
| (86) |
Number |
PCT/JP2014/078553 |
|
Date |
2014-10-28 |
PCT application publication
| (87) |
Number |
WO 2015/064550 |
|
Date |
2015-05-07 |
Priority applications
| (30) |
Number |
Date |
Country code |
|
2013225480 |
2013-10-30
|
JP |
Inventors
| (72) |
SUGIMOTO, Tatsuya, JP
|
Grantee
| (73) |
Zeon Corporation,
6-2, Marunouchi 1-chome, Chiyoda-ku Tokyo 100-8246,
JP
|
Title
| (54) |
HIGH-PURITY FLUORINATED HYDROCARBON, USE AS A PLASMA ETCHING GAS, AND PLASMA ETCHING METHOD |
| |
HIGH-PURITY FLUORINATED HYDROCARBON, USE AS A PLASMA ETCHING GAS, AND PLASMA ETCHING METHOD |
