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Legal status
Patent not validated
| (51) | INT.CL. | G03F 7/00 |
| (11) | Number of the document | 3084522 |
| (13) | Kind of document | T |
| (96) | European patent application number | 14808647.3 |
| Date of filing the European patent application | 2014-12-08 | |
| (97) | Date of publication of the European application | 2016-10-26 |
| (45) | Date of publication and mention of the grant of the patent | 2020-09-09 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/EP2014/076849 |
| Date | 2014-12-08 |
| (87) | Number | WO 2015/091047 |
| Date | 2015-06-25 |
| (30) | Number | Date | Country code |
| 201314107325 | 2013-12-16 | US |
| (72) |
YI, Yi, US
YIN, Jian, US
LIN, Guanyang, US
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| (73) |
Merck Patent GmbH,
Frankfurter Strasse 250, 64293 Darmstadt,
DE
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| (54) | UNDERLAYER COMPOSITION FOR PROMOTING SELF ASSEMBLY AND METHOD OF MAKING AND USING THE SAME |
| UNDERLAYER COMPOSITION FOR PROMOTING SELF ASSEMBLY AND METHOD OF MAKING AND USING THE SAME |