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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | G03F 7/00 |
| (11) | Patento numeris | 3084522 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 14808647.3 |
| Europos patento paraiškos padavimo data | 2014-12-08 | |
| (97) | Europos patento paraiškos paskelbimo data | 2016-10-26 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2020-09-09 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/EP2014/076849 |
| Data | 2014-12-08 |
| (87) | Numeris | WO 2015/091047 |
| Data | 2015-06-25 |
| (30) | Numeris | Data | Šalis |
| 201314107325 | 2013-12-16 | US |
| (72) |
YI, Yi, US
YIN, Jian, US
LIN, Guanyang, US
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| (73) |
Merck Patent GmbH,
Frankfurter Strasse 250, 64293 Darmstadt,
DE
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| (54) | UNDERLAYER COMPOSITION FOR PROMOTING SELF ASSEMBLY AND METHOD OF MAKING AND USING THE SAME |
| UNDERLAYER COMPOSITION FOR PROMOTING SELF ASSEMBLY AND METHOD OF MAKING AND USING THE SAME |