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Bibliographic data

Indications of the International Patent Classification (IPC)
(51)	INT.CL.	C23C 14/34
		H01L 21/285
		H01J 37/34

European patent
(11)	Number of the document	3098332
(13)	Kind of document	T
(96)	European patent application number	15741025.9
	Date of filing the European patent application	2015-01-20
(97)	Date of publication of the European application	2016-11-30
(45)	Date of publication and mention of the grant of the patent	2019-10-16
(46)	Date of publication of the claims translation

PCT application
(86)	Number	PCT/JP2015/051395
	Date	2015-01-20

PCT application publication
(87)	Number	WO 2015/111576
	Date	2015-07-30

Priority applications
(30)	Number	Date	Country code
	2014008740	2014-01-21	JP

Inventors
(72)	TAKIGAWA, Mikio, JP KURODA, Toshiaki, JP

Grantee
(73)	Sumitomo Chemical Company, Limited, 27-1, Shinkawa 2-chome Chuo-ku, Tokyo 104-8260, JP

Title
(54)	SPUTTERING TARGET
	SPUTTERING TARGET