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Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/311 | (2006.01) |
| C11D 11/00 | (2006.01) |
| (11) | Number of the document | 3104398 |
| (13) | Kind of document | T |
| (96) | European patent application number | 16178830.2 |
| Date of filing the European patent application | 2014-12-03 | |
| (97) | Date of publication of the European application | 2016-12-14 |
| (45) | Date of publication and mention of the grant of the patent | 2020-03-11 |
| (46) | Date of publication of the claims translation |
| (30) | Number | Date | Country code |
| 201361912697 P | 2013-12-06 | US | |
| 201461936999 P | 2014-02-07 | US |
| (72) |
TAKAHASHI, Tomonori, US
DU, Bing, US
WOJTCZAK, William A., US
DORY, Thomas, US
KNEER, Emil A., US
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| (73) |
Fujifilm Electronic Materials USA, Inc.,
80 Circuit Drive, North Kingstown
Rhode Island 02852,
US
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| (54) | CLEANING FORMULATION AND METHOD FOR REMOVING RESIDUES ON SURFACES |
| CLEANING FORMULATION AND METHOD FOR REMOVING RESIDUES ON SURFACES |