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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01L 21/311 | (2006.01) |
| C11D 11/00 | (2006.01) |
| (11) | Patento numeris | 3104398 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 16178830.2 |
| Europos patento paraiškos padavimo data | 2014-12-03 | |
| (97) | Europos patento paraiškos paskelbimo data | 2016-12-14 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2020-03-11 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (30) | Numeris | Data | Šalis |
| 201361912697 P | 2013-12-06 | US | |
| 201461936999 P | 2014-02-07 | US |
| (72) |
TAKAHASHI, Tomonori, US
DU, Bing, US
WOJTCZAK, William A., US
DORY, Thomas, US
KNEER, Emil A., US
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| (73) |
Fujifilm Electronic Materials USA, Inc.,
80 Circuit Drive, North Kingstown
Rhode Island 02852,
US
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| (54) | CLEANING FORMULATION AND METHOD FOR REMOVING RESIDUES ON SURFACES |
| CLEANING FORMULATION AND METHOD FOR REMOVING RESIDUES ON SURFACES |