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Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/673 | |
| B65D 85/86 | |||
| B65G 1/00 | |||
| H01L 21/67 | |||
| H01L 21/677 | |||
| B08B 5/04 | |||
| B08B 9/08 |
| (11) | Number of the document | 3104401 |
| (13) | Kind of document | T |
| (96) | European patent application number | 14881475.9 |
| Date of filing the European patent application | 2014-12-17 | |
| (97) | Date of publication of the European application | 2016-12-14 |
| (45) | Date of publication and mention of the grant of the patent | 2021-02-03 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/JP2014/083436 |
| Date | 2014-12-17 |
| (87) | Number | WO 2015/118782 |
| Date | 2015-08-13 |
| (30) | Number | Date | Country code |
| 2014022508 | 2014-02-07 | JP |
| (72) |
MURATA Masanao, JP
YAMAJI Takashi, JP
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| (73) |
Murata Machinery, Ltd.,
3, Minami Ochiai-cho Kisshoin Minami-ku, Kyoto-shi, Kyoto 601-8326,
JP
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| (54) | PURGE DEVICE AND PURGE METHOD |
| PURGE DEVICE AND PURGE METHOD |