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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01L 21/673 | |
| B65D 85/86 | |||
| B65G 1/00 | |||
| H01L 21/67 | |||
| H01L 21/677 | |||
| B08B 5/04 | |||
| B08B 9/08 |
| (11) | Patento numeris | 3104401 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 14881475.9 |
| Europos patento paraiškos padavimo data | 2014-12-17 | |
| (97) | Europos patento paraiškos paskelbimo data | 2016-12-14 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2021-02-03 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/JP2014/083436 |
| Data | 2014-12-17 |
| (87) | Numeris | WO 2015/118782 |
| Data | 2015-08-13 |
| (30) | Numeris | Data | Šalis |
| 2014022508 | 2014-02-07 | JP |
| (72) |
MURATA Masanao, JP
YAMAJI Takashi, JP
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| (73) |
Murata Machinery, Ltd.,
3, Minami Ochiai-cho Kisshoin Minami-ku, Kyoto-shi, Kyoto 601-8326,
JP
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| (54) | PURGE DEVICE AND PURGE METHOD |
| PURGE DEVICE AND PURGE METHOD |