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Legal status
Patent not validated
| (51) | INT.CL. | H01S 3/10 | |
| G01N 21/39 |
| (11) | Number of the document | 3120427 |
| (13) | Kind of document | T |
| (96) | European patent application number | 15765616.6 |
| Date of filing the European patent application | 2015-03-19 | |
| (97) | Date of publication of the European application | 2017-01-25 |
| (45) | Date of publication and mention of the grant of the patent | 2020-09-23 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2015/021462 |
| Date | 2015-03-19 |
| (87) | Number | WO 2015/143152 |
| Date | 2015-09-24 |
| (30) | Number | Date | Country code |
| 201461955792 P | 2014-03-20 | US | |
| 201414300227 | 2014-06-09 | US |
| (72) |
DENG, Yujun, US
CHUANG, Yung-Ho Alex, US
FIELDEN, John, US
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| (73) |
Kla-Tencor Corporation,
Legal Department One Technology Drive, Milpitas, California 95035,
US
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| (54) | SYSTEM AND METHOD FOR REDUCING THE BANDWIDTH OF A LASER AND AN INSPECTION SYSTEM AND METHOD USING A LASER |
| SYSTEM AND METHOD FOR REDUCING THE BANDWIDTH OF A LASER AND AN INSPECTION SYSTEM AND METHOD USING A LASER |