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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01S 3/10 | |
| G01N 21/39 |
| (11) | Patento numeris | 3120427 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 15765616.6 |
| Europos patento paraiškos padavimo data | 2015-03-19 | |
| (97) | Europos patento paraiškos paskelbimo data | 2017-01-25 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2020-09-23 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2015/021462 |
| Data | 2015-03-19 |
| (87) | Numeris | WO 2015/143152 |
| Data | 2015-09-24 |
| (30) | Numeris | Data | Šalis |
| 201461955792 P | 2014-03-20 | US | |
| 201414300227 | 2014-06-09 | US |
| (72) |
DENG, Yujun, US
CHUANG, Yung-Ho Alex, US
FIELDEN, John, US
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| (73) |
Kla-Tencor Corporation,
Legal Department One Technology Drive, Milpitas, California 95035,
US
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| (54) | SYSTEM AND METHOD FOR REDUCING THE BANDWIDTH OF A LASER AND AN INSPECTION SYSTEM AND METHOD USING A LASER |
| SYSTEM AND METHOD FOR REDUCING THE BANDWIDTH OF A LASER AND AN INSPECTION SYSTEM AND METHOD USING A LASER |