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Legal status
Patent not validated
| (51) | INT.CL. | G01B 5/00 | (2006.01) |
| G01B 9/0205 | (2013.01) | ||
| G01D 11/24 | (2006.01) | ||
| G03F 7/70775 | (2013.01) | ||
| G01B 5/0014 | (2013.01) | ||
| G01D 11/245 | (2013.01) |
| (11) | Number of the document | 3137847 |
| (13) | Kind of document | T |
| (96) | European patent application number | 15721571.6 |
| Date of filing the European patent application | 2015-04-29 | |
| (97) | Date of publication of the European application | 2017-03-08 |
| (45) | Date of publication and mention of the grant of the patent | 2022-04-13 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/EP2015/000872 |
| Date | 2015-04-29 |
| (87) | Number | WO 2015/165587 |
| Date | 2015-11-05 |
| (30) | Number | Date | Country code |
| 102014006305 | 2014-04-30 | DE |
| (72) |
ZECH, Martin , DE
THURNER, Klaus , DE
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| (73) |
Attocube Systems AG ,
Eglfinger Weg 2, 85540 Haar,
DE
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| (54) | INTERFEROMETRISCHER WEGSENSOR ZUR INTEGRATION IN WERKZEUGMASCHINEN UND HALBLEITER-LITHOGRAFIESYSTEMEN |
| INTERFEROMETRIC DISPLACEMENT SENSOR FOR INTEGRATION INTO MACHINE TOOLS AND SEMICONDUCTOR LITHOGRAPHY SYSTEMS |