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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | G01B 5/00 | (2006.01) |
| G01B 9/0205 | (2013.01) | ||
| G01D 11/24 | (2006.01) | ||
| G03F 7/70775 | (2013.01) | ||
| G01B 5/0014 | (2013.01) | ||
| G01D 11/245 | (2013.01) |
| (11) | Patento numeris | 3137847 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 15721571.6 |
| Europos patento paraiškos padavimo data | 2015-04-29 | |
| (97) | Europos patento paraiškos paskelbimo data | 2017-03-08 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2022-04-13 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/EP2015/000872 |
| Data | 2015-04-29 |
| (87) | Numeris | WO 2015/165587 |
| Data | 2015-11-05 |
| (30) | Numeris | Data | Šalis |
| 102014006305 | 2014-04-30 | DE |
| (72) |
ZECH, Martin , DE
THURNER, Klaus , DE
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| (73) |
Attocube Systems AG ,
Eglfinger Weg 2, 85540 Haar,
DE
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| (54) | INTERFEROMETRISCHER WEGSENSOR ZUR INTEGRATION IN WERKZEUGMASCHINEN UND HALBLEITER-LITHOGRAFIESYSTEMEN |
| INTERFEROMETRIC DISPLACEMENT SENSOR FOR INTEGRATION INTO MACHINE TOOLS AND SEMICONDUCTOR LITHOGRAPHY SYSTEMS |