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Legal status
Patent not validated
| (51) | INT.CL. | H01L 51/00 |
| (11) | Number of the document | 3170211 |
| (13) | Kind of document | T |
| (96) | European patent application number | 15821581.4 |
| Date of filing the European patent application | 2015-07-16 | |
| (97) | Date of publication of the European application | 2017-05-24 |
| (45) | Date of publication and mention of the grant of the patent | 2019-04-17 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2015/040810 |
| Date | 2015-07-16 |
| (87) | Number | WO 2016/011296 |
| Date | 2016-01-21 |
| (30) | Number | Date | Country code |
| 201462026242 P | 2014-07-18 | US | |
| 201462034718 P | 2014-08-07 | US |
| (72) |
MAUCK, Justin, US
KO, Alexander Sou-Kang, US
VRONSKY, Eliyahu, US
IYENGAR, Prahallad, US
PUN, Digby, US
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| (73) |
Kateeva, Inc.,
7015 Gateway Boulevard, Newark, CA 94560,
US
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| (54) | GAS ENCLOSURE SYSTEMS AND METHODS UTILIZING CROSS-FLOW GAS CIRCULATION AND FILTRATION |
| GAS ENCLOSURE SYSTEMS AND METHODS UTILIZING CROSS-FLOW GAS CIRCULATION AND FILTRATION |