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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01L 51/00 |
| (11) | Patento numeris | 3170211 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 15821581.4 |
| Europos patento paraiškos padavimo data | 2015-07-16 | |
| (97) | Europos patento paraiškos paskelbimo data | 2017-05-24 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2019-04-17 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2015/040810 |
| Data | 2015-07-16 |
| (87) | Numeris | WO 2016/011296 |
| Data | 2016-01-21 |
| (30) | Numeris | Data | Šalis |
| 201462026242 P | 2014-07-18 | US | |
| 201462034718 P | 2014-08-07 | US |
| (72) |
MAUCK, Justin, US
KO, Alexander Sou-Kang, US
VRONSKY, Eliyahu, US
IYENGAR, Prahallad, US
PUN, Digby, US
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| (73) |
Kateeva, Inc.,
7015 Gateway Boulevard, Newark, CA 94560,
US
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| (54) | GAS ENCLOSURE SYSTEMS AND METHODS UTILIZING CROSS-FLOW GAS CIRCULATION AND FILTRATION |
| GAS ENCLOSURE SYSTEMS AND METHODS UTILIZING CROSS-FLOW GAS CIRCULATION AND FILTRATION |