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Legal status
Patent not validated
| (51) | INT.CL. | G03F 7/42 | |
| C11D 7/26 | |||
| C11D 7/32 | |||
| C11D 7/50 | |||
| C11D 7/10 |
| (11) | Number of the document | 3249470 |
| (13) | Kind of document | T |
| (96) | European patent application number | 17172498.2 |
| Date of filing the European patent application | 2017-05-23 | |
| (97) | Date of publication of the European application | 2017-11-29 |
| (45) | Date of publication and mention of the grant of the patent | 2019-04-03 |
| (46) | Date of publication of the claims translation |
| (30) | Number | Date | Country code |
| 201662340204 P | 2016-05-23 | US |
| (72) |
SUGISHIMA, Yasuo, US
MIZUTANI, Atsushi, BE
WOJTCZAK, William A., US
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| (73) |
FUJIFILM Electronic Materials U.S.A, Inc.,
80 Circuit Drive, North Kingstown RI 02852,
US
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| (54) | STRIPPING COMPOSITIONS FOR REMOVING PHOTORESISTS FROM SEMICONDUCTOR SUBSTRATES |
| STRIPPING COMPOSITIONS FOR REMOVING PHOTORESISTS FROM SEMICONDUCTOR SUBSTRATES |