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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
(51) | INT.CL. | G03F 7/42 | |
C11D 7/26 | |||
C11D 7/32 | |||
C11D 7/50 | |||
C11D 7/10 |
(11) | Patento numeris | 3249470 |
(13) | Dokumento rūšis | T |
(96) | Europos patento paraiškos numeris | 17172498.2 |
Europos patento paraiškos padavimo data | 2017-05-23 | |
(97) | Europos patento paraiškos paskelbimo data | 2017-11-29 |
(45) | Paskelbimo apie Europos patento išdavimą data | 2019-04-03 |
(46) | Apibrėžties vertimo paskelbimo data |
(30) | Numeris | Data | Šalis |
201662340204 P | 2016-05-23 | US |
(72) |
SUGISHIMA, Yasuo, US
MIZUTANI, Atsushi, BE
WOJTCZAK, William A., US
|
(73) |
FUJIFILM Electronic Materials U.S.A, Inc.,
80 Circuit Drive, North Kingstown RI 02852,
US
|
(54) | STRIPPING COMPOSITIONS FOR REMOVING PHOTORESISTS FROM SEMICONDUCTOR SUBSTRATES |
STRIPPING COMPOSITIONS FOR REMOVING PHOTORESISTS FROM SEMICONDUCTOR SUBSTRATES |