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Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/02115 | (2013.01) |
| H01L 21/033 | (2006.01) | ||
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| H01L 21/02238 | (2013.01) | ||
| C23C 14/00 | (2006.01) | ||
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| C03C 15/00 | (2013.01) | ||
| C03C 23/0055 | (2013.01) | ||
| C03C2218/335 | (2013.01) | ||
| H01J 37/05 | (2013.01) | ||
| H01J 37/317 | (2013.01) | ||
| H01J2237/006 | (2013.01) | ||
| H01J2237/0812 | (2013.01) | ||
| C23C 14/042 | (2013.01) | ||
| C23C 14/0605 | (2013.01) | ||
| H01L 21/0337 | (2013.01) | ||
| C23C 14/5806 | (2013.01) |
| (11) | Number of the document | 3268505 |
| (13) | Kind of document | T |
| (96) | European patent application number | 16762616.7 |
| Date of filing the European patent application | 2016-03-11 | |
| (97) | Date of publication of the European application | 2018-01-17 |
| (45) | Date of publication and mention of the grant of the patent | 2022-05-04 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2016/022058 |
| Date | 2016-03-11 |
| (87) | Number | WO 2016/145337 |
| Date | 2016-09-15 |
| (30) | Number | Date | Country code |
| 201562131669 P | 2015-03-11 | US |
| (72) |
KIRKPATRICK, Sean, R. , US
SVRLUGA, Richard, C. , US
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| (73) |
Exogenesis Corporation ,
20 Fortune Drive, Billerica, Massachusetts 01821,
US
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| (54) | METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY |
| METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY |