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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01L 21/02115 | (2013.01) |
| H01L 21/033 | (2006.01) | ||
| H01L 21/02 | (2006.01) | ||
| H01L 21/02238 | (2013.01) | ||
| C23C 14/00 | (2006.01) | ||
| H01L 21/02274 | (2013.01) | ||
| H01L 21/3065 | (2013.01) | ||
| H01L 21/3081 | (2013.01) | ||
| H01L 21/31105 | (2013.01) | ||
| H01L 21/31116 | (2013.01) | ||
| H01L 21/321 | (2013.01) | ||
| C03C 15/00 | (2013.01) | ||
| C03C 23/0055 | (2013.01) | ||
| C03C2218/335 | (2013.01) | ||
| H01J 37/05 | (2013.01) | ||
| H01J 37/317 | (2013.01) | ||
| H01J2237/006 | (2013.01) | ||
| H01J2237/0812 | (2013.01) | ||
| C23C 14/042 | (2013.01) | ||
| C23C 14/0605 | (2013.01) | ||
| H01L 21/0337 | (2013.01) | ||
| C23C 14/5806 | (2013.01) |
| (11) | Patento numeris | 3268505 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 16762616.7 |
| Europos patento paraiškos padavimo data | 2016-03-11 | |
| (97) | Europos patento paraiškos paskelbimo data | 2018-01-17 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2022-05-04 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2016/022058 |
| Data | 2016-03-11 |
| (87) | Numeris | WO 2016/145337 |
| Data | 2016-09-15 |
| (30) | Numeris | Data | Šalis |
| 201562131669 P | 2015-03-11 | US |
| (72) |
KIRKPATRICK, Sean, R. , US
SVRLUGA, Richard, C. , US
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| (73) |
Exogenesis Corporation ,
20 Fortune Drive, Billerica, Massachusetts 01821,
US
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| (54) | METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY |
| METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY |