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Legal status
Patent not validated
| (51) | INT.CL. | G01N 21/956 | (2006.01) |
| G02B 27/0905 | (2013.01) | ||
| G01N 21/95 | (2006.01) | ||
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| G02F 1/33 | (2006.01) | ||
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| G01N2201/104 | (2013.01) | ||
| G02B 27/12 | (2006.01) | ||
| G01N2021/8848 | (2013.01) | ||
| G01N 21/95607 | (2013.01) | ||
| G01N2201/106 | (2013.01) | ||
| G02B 27/0944 | (2013.01) | ||
| G02F 1/33 | (2013.01) | ||
| G01N 21/956 | (2013.01) | ||
| G02B 26/101 | (2013.01) | ||
| G01N 21/9501 | (2013.01) | ||
| G01N2201/0635 | (2013.01) |
| (11) | Number of the document | 3295477 |
| (13) | Kind of document | T |
| (96) | European patent application number | 16793208.6 |
| Date of filing the European patent application | 2016-05-04 | |
| (97) | Date of publication of the European application | 2018-03-21 |
| (45) | Date of publication and mention of the grant of the patent | 2021-12-15 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2016/030838 |
| Date | 2016-05-04 |
| (87) | Number | WO 2016/182820 |
| Date | 2016-11-17 |
| (30) | Number | Date | Country code |
| 201562159173 P | 2015-05-08 | US | |
| 201514982747 | 2015-12-29 | US |
| (72) |
SULLIVAN, Jamie , US
CHURIN, Yevgeniy , US
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| (73) |
KLA - Tencor Corporation ,
One Technology Drive, Milpitas, California 95035,
US
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| (54) | SYSTEMS AND METHODS FOR OBLIQUE INCIDENCE SCANNING WITH 2D ARRAY OF SPOTS |
| SYSTEMS AND METHODS FOR OBLIQUE INCIDENCE SCANNING WITH 2D ARRAY OF SPOTS |