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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | G01N 21/956 | (2006.01) |
| G02B 27/0905 | (2013.01) | ||
| G01N 21/95 | (2006.01) | ||
| G02B 21/002 | (2013.01) | ||
| G01N 21/88 | (2006.01) | ||
| G02B 21/06 | (2013.01) | ||
| G02B 21/00 | (2006.01) | ||
| G01N 21/8806 | (2013.01) | ||
| G02B 27/425 | (2013.01) | ||
| G02B 27/10 | (2006.01) | ||
| G02B 21/06 | (2006.01) | ||
| G01N2201/105 | (2013.01) | ||
| G02B 27/09 | (2006.01) | ||
| G02B 27/123 | (2013.01) | ||
| G02B 27/42 | (2006.01) | ||
| G02B 27/1086 | (2013.01) | ||
| G02F 1/33 | (2006.01) | ||
| G02B 21/006 | (2013.01) | ||
| G02B 26/10 | (2006.01) | ||
| G01N2201/104 | (2013.01) | ||
| G02B 27/12 | (2006.01) | ||
| G01N2021/8848 | (2013.01) | ||
| G01N 21/95607 | (2013.01) | ||
| G01N2201/106 | (2013.01) | ||
| G02B 27/0944 | (2013.01) | ||
| G02F 1/33 | (2013.01) | ||
| G01N 21/956 | (2013.01) | ||
| G02B 26/101 | (2013.01) | ||
| G01N 21/9501 | (2013.01) | ||
| G01N2201/0635 | (2013.01) |
| (11) | Patento numeris | 3295477 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 16793208.6 |
| Europos patento paraiškos padavimo data | 2016-05-04 | |
| (97) | Europos patento paraiškos paskelbimo data | 2018-03-21 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2021-12-15 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2016/030838 |
| Data | 2016-05-04 |
| (87) | Numeris | WO 2016/182820 |
| Data | 2016-11-17 |
| (30) | Numeris | Data | Šalis |
| 201562159173 P | 2015-05-08 | US | |
| 201514982747 | 2015-12-29 | US |
| (72) |
SULLIVAN, Jamie , US
CHURIN, Yevgeniy , US
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| (73) |
KLA - Tencor Corporation ,
One Technology Drive, Milpitas, California 95035,
US
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| (54) | SYSTEMS AND METHODS FOR OBLIQUE INCIDENCE SCANNING WITH 2D ARRAY OF SPOTS |
| SYSTEMS AND METHODS FOR OBLIQUE INCIDENCE SCANNING WITH 2D ARRAY OF SPOTS |