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Legal status
Patent not validated
| (51) | INT.CL. | C07F 19/00 | (2006.01) |
| C07F 15/06 | (2013.01) | ||
| C07F 15/06 | (2006.01) | ||
| C07F 17/00 | (2013.01) | ||
| C07F 17/00 | (2006.01) | ||
| C07F 19/00 | (2013.01) | ||
| C23C 16/18 | (2006.01) | ||
| C23C 16/18 | (2013.01) | ||
| H01L 21/28 | (2006.01) | ||
| H01L 21/28562 | (2013.01) | ||
| H01L 21/285 | (2006.01) | ||
| H01L 21/28097 | (2013.01) | ||
| H01L 21/28518 | (2013.01) |
| (11) | Number of the document | 3392259 |
| (13) | Kind of document | T |
| (96) | European patent application number | 16875596.5 |
| Date of filing the European patent application | 2016-12-12 | |
| (97) | Date of publication of the European application | 2018-10-24 |
| (45) | Date of publication and mention of the grant of the patent | 2023-06-07 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/JP2016/086932 |
| Date | 2016-12-12 |
| (87) | Number | WO 2017/104619 |
| Date | 2017-06-22 |
| (30) | Number | Date | Country code |
| 2015245678 | 2015-12-16 | JP | |
| 2016129885 | 2016-06-30 | JP | |
| 2016204107 | 2016-10-18 | JP |
| (72) |
KOISO, Naoyuki , JP
YAMAMOTO, Yuki , JP
OIKE, Hiroyuki , JP
HAYAKAWA, Teppei , JP
FURUKAWA, Taishi , JP
TADA, Ken-ichi , JP
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| (73) |
Tosoh Corporation ,
4560 Kaisei-cho
Shunan-shi, Yamaguchi 746-8501,
JP
Sagami Chemical Research Institute , 2743-1, Hayakawa, Ayase-shi Kanagawa 252-1193, JP |
| (54) | SUBSTITUTED CYCLOPENTADIENYL COBALT COMPLEX AND METHOD FOR PRODUCTION THEREOF |
| SUBSTITUTED CYCLOPENTADIENYL COBALT COMPLEX AND METHOD FOR PRODUCTION THEREOF |