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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
(51) | INT.CL. | C07F 19/00 | (2006.01) |
C07F 15/06 | (2013.01) | ||
C07F 15/06 | (2006.01) | ||
C07F 17/00 | (2013.01) | ||
C07F 17/00 | (2006.01) | ||
C07F 19/00 | (2013.01) | ||
C23C 16/18 | (2006.01) | ||
C23C 16/18 | (2013.01) | ||
H01L 21/28 | (2006.01) | ||
H01L 21/28562 | (2013.01) | ||
H01L 21/285 | (2006.01) | ||
H01L 21/28097 | (2013.01) | ||
H01L 21/28518 | (2013.01) |
(11) | Patento numeris | 3392259 |
(13) | Dokumento rūšis | T |
(96) | Europos patento paraiškos numeris | 16875596.5 |
Europos patento paraiškos padavimo data | 2016-12-12 | |
(97) | Europos patento paraiškos paskelbimo data | 2018-10-24 |
(45) | Paskelbimo apie Europos patento išdavimą data | 2023-06-07 |
(46) | Apibrėžties vertimo paskelbimo data |
(86) | Numeris | PCT/JP2016/086932 |
Data | 2016-12-12 |
(87) | Numeris | WO 2017/104619 |
Data | 2017-06-22 |
(30) | Numeris | Data | Šalis |
2015245678 | 2015-12-16 | JP | |
2016129885 | 2016-06-30 | JP | |
2016204107 | 2016-10-18 | JP |
(72) |
KOISO, Naoyuki , JP
YAMAMOTO, Yuki , JP
OIKE, Hiroyuki , JP
HAYAKAWA, Teppei , JP
FURUKAWA, Taishi , JP
TADA, Ken-ichi , JP
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(73) |
Tosoh Corporation ,
4560 Kaisei-cho
Shunan-shi, Yamaguchi 746-8501,
JP
Sagami Chemical Research Institute , 2743-1, Hayakawa, Ayase-shi Kanagawa 252-1193, JP |
(54) | SUBSTITUTED CYCLOPENTADIENYL COBALT COMPLEX AND METHOD FOR PRODUCTION THEREOF |
SUBSTITUTED CYCLOPENTADIENYL COBALT COMPLEX AND METHOD FOR PRODUCTION THEREOF |