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Legal status
Patent not validated
| (51) | INT.CL. | G03F 7/038 | |
| G03F 7/004 | |||
| G03F 7/36 | |||
| G03F 7/38 | |||
| G03F 7/40 |
| (11) | Number of the document | 3394674 |
| (13) | Kind of document | T |
| (96) | European patent application number | 16815855.8 |
| Date of filing the European patent application | 2016-12-20 | |
| (97) | Date of publication of the European application | 2018-10-31 |
| (45) | Date of publication and mention of the grant of the patent | 2020-05-06 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/EP2016/081903 |
| Date | 2016-12-20 |
| (87) | Number | WO 2017/108778 |
| Date | 2017-06-29 |
| (30) | Number | Date | Country code |
| 201514976498 | 2015-12-21 | US |
| (72) |
CHEN, Chunwei, US
LIU, Weihong, US
LU, PingHung, US
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| (73) |
AZ Electronic Materials Luxembourg S.ą.r.l.,
46 Place Guillaume II, 1648 Luxembourg,
LU
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| (54) | NEGATIVE-WORKING PHOTORESIST COMPOSITIONS FOR LASER ABLATION AND PROCESSES USING THEM |
| NEGATIVE-WORKING PHOTORESIST COMPOSITIONS FOR LASER ABLATION AND PROCESSES USING THEM |