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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | G03F 7/038 | |
| G03F 7/004 | |||
| G03F 7/36 | |||
| G03F 7/38 | |||
| G03F 7/40 |
| (11) | Patento numeris | 3394674 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 16815855.8 |
| Europos patento paraiškos padavimo data | 2016-12-20 | |
| (97) | Europos patento paraiškos paskelbimo data | 2018-10-31 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2020-05-06 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/EP2016/081903 |
| Data | 2016-12-20 |
| (87) | Numeris | WO 2017/108778 |
| Data | 2017-06-29 |
| (30) | Numeris | Data | Šalis |
| 201514976498 | 2015-12-21 | US |
| (72) |
CHEN, Chunwei, US
LIU, Weihong, US
LU, PingHung, US
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| (73) |
AZ Electronic Materials Luxembourg S.ą.r.l.,
46 Place Guillaume II, 1648 Luxembourg,
LU
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| (54) | NEGATIVE-WORKING PHOTORESIST COMPOSITIONS FOR LASER ABLATION AND PROCESSES USING THEM |
| NEGATIVE-WORKING PHOTORESIST COMPOSITIONS FOR LASER ABLATION AND PROCESSES USING THEM |