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Legal status
Patent not validated
| (51) | INT.CL. | G01N 23/2251 | (2018.01) |
| G01N 23/2251 | (2013.01) | ||
| H01J 37/28 | (2006.01) | ||
| G01N2223/418 | (2013.01) | ||
| H01J 37/05 | (2006.01) | ||
| G01N2223/6116 | (2013.01) | ||
| H01J 37/244 | (2006.01) | ||
| H01J 37/28 | (2013.01) | ||
| H01J2237/057 | (2013.01) | ||
| H01J 37/05 | (2013.01) | ||
| H01J2237/2448 | (2013.01) | ||
| H01J 37/244 | (2013.01) |
| (11) | Number of the document | 3408829 |
| (13) | Kind of document | T |
| (96) | European patent application number | 17744929.5 |
| Date of filing the European patent application | 2017-01-27 | |
| (97) | Date of publication of the European application | 2018-12-05 |
| (45) | Date of publication and mention of the grant of the patent | 2023-10-25 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2017/015223 |
| Date | 2017-01-27 |
| (87) | Number | WO 2017/132435 |
| Date | 2017-08-03 |
| (30) | Number | Date | Country code |
| 201662287626 P | 2016-01-27 | US |
| (72) |
REN, Weiming , US
LIU, Xuedong , US
HU, Xuerang , US
CHEN, Zhongwei , US
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| (73) |
ASML Netherlands B.V. ,
De Run 6501, 5504 DR Veldhoven,
NL
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| (54) | APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS |
| APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS |