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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | G01N 23/2251 | (2018.01) |
| G01N 23/2251 | (2013.01) | ||
| H01J 37/28 | (2006.01) | ||
| G01N2223/418 | (2013.01) | ||
| H01J 37/05 | (2006.01) | ||
| G01N2223/6116 | (2013.01) | ||
| H01J 37/244 | (2006.01) | ||
| H01J 37/28 | (2013.01) | ||
| H01J2237/057 | (2013.01) | ||
| H01J 37/05 | (2013.01) | ||
| H01J2237/2448 | (2013.01) | ||
| H01J 37/244 | (2013.01) |
| (11) | Patento numeris | 3408829 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 17744929.5 |
| Europos patento paraiškos padavimo data | 2017-01-27 | |
| (97) | Europos patento paraiškos paskelbimo data | 2018-12-05 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2023-10-25 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2017/015223 |
| Data | 2017-01-27 |
| (87) | Numeris | WO 2017/132435 |
| Data | 2017-08-03 |
| (30) | Numeris | Data | Šalis |
| 201662287626 P | 2016-01-27 | US |
| (72) |
REN, Weiming , US
LIU, Xuedong , US
HU, Xuerang , US
CHEN, Zhongwei , US
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| (73) |
ASML Netherlands B.V. ,
De Run 6501, 5504 DR Veldhoven,
NL
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| (54) | APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS |
| APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS |