|
|
|
|
|
Legal status
Patent not validated
| (51) | INT.CL. | G03F 7/20 | (2006.01) |
| H01L 21/027 | (2013.01) | ||
| G03F 7/00 | (2006.01) | ||
| G03F 7/70683 | (2013.01) | ||
| H01L 21/027 | (2006.01) | ||
| H01L 21/66 | (2006.01) |
| (11) | Number of the document | 3440511 |
| (13) | Kind of document | T |
| (96) | European patent application number | 16898139.7 |
| Date of filing the European patent application | 2016-11-04 | |
| (97) | Date of publication of the European application | 2019-02-13 |
| (45) | Date of publication and mention of the grant of the patent | 2024-03-06 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2016/060626 |
| Date | 2016-11-04 |
| (87) | Number | WO 2017/176314 |
| Date | 2017-10-12 |
| (30) | Number | Date | Country code |
| 201662318086 P | 2016-04-04 | US |
| (72) |
LEVINSKI, Vladimir , IL
HAJAJ, Eitan , IL
ITZKOVICH, Tal , IL
AHARON, Sharon , IL
ADEL, Michael E. , IL
PASKOVER, Yuri , US
NEGRI, Daria , DE
LUBASHEVSKY, Yuval , DE
MANASSEN, Amnon , DE
LEE, Myungjun , DE
SMITH, Mark D , DE
|
| (73) |
KLA-Tencor Corporation ,
One Technology Drive, Milpitas, California 95035,
US
|
| (54) | PROCESS COMPATIBILITY IMPROVEMENT BY FILL FACTOR MODULATION |
| PROCESS COMPATIBILITY IMPROVEMENT BY FILL FACTOR MODULATION |