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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | G03F 7/20 | (2006.01) |
| H01L 21/027 | (2013.01) | ||
| G03F 7/00 | (2006.01) | ||
| G03F 7/70683 | (2013.01) | ||
| H01L 21/027 | (2006.01) | ||
| H01L 21/66 | (2006.01) |
| (11) | Patento numeris | 3440511 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 16898139.7 |
| Europos patento paraiškos padavimo data | 2016-11-04 | |
| (97) | Europos patento paraiškos paskelbimo data | 2019-02-13 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2024-03-06 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2016/060626 |
| Data | 2016-11-04 |
| (87) | Numeris | WO 2017/176314 |
| Data | 2017-10-12 |
| (30) | Numeris | Data | Šalis |
| 201662318086 P | 2016-04-04 | US |
| (72) |
LEVINSKI, Vladimir , IL
HAJAJ, Eitan , IL
ITZKOVICH, Tal , IL
AHARON, Sharon , IL
ADEL, Michael E. , IL
PASKOVER, Yuri , US
NEGRI, Daria , DE
LUBASHEVSKY, Yuval , DE
MANASSEN, Amnon , DE
LEE, Myungjun , DE
SMITH, Mark D , DE
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| (73) |
KLA-Tencor Corporation ,
One Technology Drive, Milpitas, California 95035,
US
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| (54) | PROCESS COMPATIBILITY IMPROVEMENT BY FILL FACTOR MODULATION |
| PROCESS COMPATIBILITY IMPROVEMENT BY FILL FACTOR MODULATION |