|
|
|
|
|
Legal status
Patent not validated
| (51) | INT.CL. | H01J 37/317 | (2006.01) |
| (11) | Number of the document | 3440690 |
| (13) | Kind of document | T |
| (96) | European patent application number | 17717106.3 |
| Date of filing the European patent application | 2017-04-04 | |
| (97) | Date of publication of the European application | 2019-02-13 |
| (45) | Date of publication and mention of the grant of the patent | 2021-08-11 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/EP2017/058018 |
| Date | 2017-04-04 |
| (87) | Number | WO 2017/174597 |
| Date | 2017-10-12 |
| (30) | Number | Date | Country code |
| 102016106119 | 2016-04-04 | DE |
| (72) |
KRIPPENDORF, Florian , DE
CSATO, Constantin , DE
|
| (73) |
mi2-factory GmbH ,
Moritz-von-Rohr-Str. 1a, 07745 Jena,
DE
|
| (54) | ENERGIEFILTERELEMENT FÜR IONENIMPLANTATIONSANLAGEN FÜR DEN EINSATZ IN DER PRODUKTION VON WAFERN |
| ENERGY FILTER ELEMENT FOR ION IMPLANTATION SYSTEMS FOR THE USE IN THE PRODUCTION OF WAFERS |