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Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/67 | (2006.01) |
| H01L 21/6719 | (2013.01) | ||
| B41J 2/175 | (2006.01) | ||
| B41J 2/175 | (2013.01) | ||
| B41J 29/13 | (2006.01) | ||
| B41J 29/02 | (2013.01) | ||
| B41J 29/02 | (2006.01) | ||
| B41J 29/13 | (2013.01) |
| (11) | Number of the document | 3474317 |
| (13) | Kind of document | T |
| (96) | European patent application number | 18201256.7 |
| Date of filing the European patent application | 2014-03-11 | |
| (97) | Date of publication of the European application | 2019-04-24 |
| (45) | Date of publication and mention of the grant of the patent | 2022-06-22 |
| (46) | Date of publication of the claims translation |
| (30) | Number | Date | Country code |
| 201313802304 | 2013-03-13 | US |
| (72) |
MAUCK, Justin , US
KO, Alexander Sou-Kang , US
VRONSKY, Eliyahu , US
ALDERSON, Shandon , US
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| (73) |
Kateeva, Inc. ,
7015 Gateway Boulevard, Newark, CA 94560,
US
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| (54) | GAS ENCLOSURE SYSTEMS AND METHODS UTILIZING AN AUXILIARY ENCLOSURE |
| GAS ENCLOSURE SYSTEMS AND METHODS UTILIZING AN AUXILIARY ENCLOSURE |