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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01L 21/67 | (2006.01) |
| H01L 21/6719 | (2013.01) | ||
| B41J 2/175 | (2006.01) | ||
| B41J 2/175 | (2013.01) | ||
| B41J 29/13 | (2006.01) | ||
| B41J 29/02 | (2013.01) | ||
| B41J 29/02 | (2006.01) | ||
| B41J 29/13 | (2013.01) |
| (11) | Patento numeris | 3474317 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 18201256.7 |
| Europos patento paraiškos padavimo data | 2014-03-11 | |
| (97) | Europos patento paraiškos paskelbimo data | 2019-04-24 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2022-06-22 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (30) | Numeris | Data | Šalis |
| 201313802304 | 2013-03-13 | US |
| (72) |
MAUCK, Justin , US
KO, Alexander Sou-Kang , US
VRONSKY, Eliyahu , US
ALDERSON, Shandon , US
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| (73) |
Kateeva, Inc. ,
7015 Gateway Boulevard, Newark, CA 94560,
US
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| (54) | GAS ENCLOSURE SYSTEMS AND METHODS UTILIZING AN AUXILIARY ENCLOSURE |
| GAS ENCLOSURE SYSTEMS AND METHODS UTILIZING AN AUXILIARY ENCLOSURE |