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Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/02 | (2006.01) |
| C23C 16/308 | (2013.01) | ||
| C23C 16/34 | (2006.01) | ||
| C23C 16/402 | (2013.01) | ||
| C23C 16/45553 | (2013.01) | ||
| C23C 16/36 | (2006.01) | ||
| C23C 16/455 | (2006.01) | ||
| H01L 21/02211 | (2013.01) | ||
| C23C 16/40 | (2006.01) | ||
| H01L 21/02337 | (2013.01) | ||
| C23C 16/30 | (2006.01) | ||
| C23C 16/345 | (2013.01) | ||
| C23C 16/56 | (2006.01) | ||
| C23C 16/56 | (2013.01) | ||
| H01L 21/02126 | (2013.01) | ||
| H01L 21/02208 | (2013.01) | ||
| H01L 21/0228 | (2013.01) | ||
| H01L 21/02326 | (2013.01) | ||
| H01L 21/0234 | (2013.01) |
| (11) | Number of the document | 3491167 |
| (13) | Kind of document | T |
| (96) | European patent application number | 17835182.1 |
| Date of filing the European patent application | 2017-07-26 | |
| (97) | Date of publication of the European application | 2019-06-05 |
| (45) | Date of publication and mention of the grant of the patent | 2023-09-06 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/US2017/043890 |
| Date | 2017-07-26 |
| (87) | Number | WO 2018/022719 |
| Date | 2018-02-01 |
| (30) | Number | Date | Country code |
| 201662367260 P | 2016-07-27 | US | |
| 201715654426 | 2017-07-19 | US |
| (72) |
CHANDRA, Haripin , US
LEI, Xinjian , US
MALLIKARJUNAN, Anupama , US
KIM, Moo-Sung , KR
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| (73) |
Versum Materials US, LLC ,
8555 S. River Parkway, Tempe, AZ 85284,
US
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| (54) | COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAINING FILMS |
| COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAINING FILMS |