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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
| (51) | INT.CL. | H01L 21/02 | (2006.01) |
| C23C 16/308 | (2013.01) | ||
| C23C 16/34 | (2006.01) | ||
| C23C 16/402 | (2013.01) | ||
| C23C 16/45553 | (2013.01) | ||
| C23C 16/36 | (2006.01) | ||
| C23C 16/455 | (2006.01) | ||
| H01L 21/02211 | (2013.01) | ||
| C23C 16/40 | (2006.01) | ||
| H01L 21/02337 | (2013.01) | ||
| C23C 16/30 | (2006.01) | ||
| C23C 16/345 | (2013.01) | ||
| C23C 16/56 | (2006.01) | ||
| C23C 16/56 | (2013.01) | ||
| H01L 21/02126 | (2013.01) | ||
| H01L 21/02208 | (2013.01) | ||
| H01L 21/0228 | (2013.01) | ||
| H01L 21/02326 | (2013.01) | ||
| H01L 21/0234 | (2013.01) |
| (11) | Patento numeris | 3491167 |
| (13) | Dokumento rūšis | T |
| (96) | Europos patento paraiškos numeris | 17835182.1 |
| Europos patento paraiškos padavimo data | 2017-07-26 | |
| (97) | Europos patento paraiškos paskelbimo data | 2019-06-05 |
| (45) | Paskelbimo apie Europos patento išdavimą data | 2023-09-06 |
| (46) | Apibrėžties vertimo paskelbimo data |
| (86) | Numeris | PCT/US2017/043890 |
| Data | 2017-07-26 |
| (87) | Numeris | WO 2018/022719 |
| Data | 2018-02-01 |
| (30) | Numeris | Data | Šalis |
| 201662367260 P | 2016-07-27 | US | |
| 201715654426 | 2017-07-19 | US |
| (72) |
CHANDRA, Haripin , US
LEI, Xinjian , US
MALLIKARJUNAN, Anupama , US
KIM, Moo-Sung , KR
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| (73) |
Versum Materials US, LLC ,
8555 S. River Parkway, Tempe, AZ 85284,
US
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| (54) | COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAINING FILMS |
| COMPOSITIONS AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAINING FILMS |