|
|
|
|
|
Legal status
Patent not validated
| (51) | INT.CL. | C11D 3/04 | (2006.01) |
| C11D 3/20 | (2006.01) | ||
| C11D 3/43 | (2006.01) | ||
| C11D 7/10 | (2006.01) | ||
| C11D 7/26 | (2006.01) | ||
| C11D 7/32 | (2006.01) | ||
| C11D 7/50 | (2006.01) | ||
| C11D 11/00 | (2006.01) | ||
| G03F 7/42 | (2006.01) | ||
| C11D 1/62 | (2006.01) | ||
| C11D 3/30 | (2006.01) | ||
| C11D 3/34 | (2006.01) |
| (11) | Number of the document | 3502225 |
| (13) | Kind of document | T |
| (96) | European patent application number | 18215456.7 |
| Date of filing the European patent application | 2018-12-21 | |
| (97) | Date of publication of the European application | 2019-06-26 |
| (45) | Date of publication and mention of the grant of the patent | 2021-09-01 |
| (46) | Date of publication of the claims translation |
| (30) | Number | Date | Country code |
| 201762609562 P | 2017-12-22 | US | |
| 201816222248 | 2018-12-17 | US |
| (72) |
Richard, Dalton Peters , US
Phenis, Michael T. , US
|
| (73) |
Versum Materials US, LLC ,
8555 S. River Parkway, Tempe, AZ 85284,
US
|
| (54) | PHOTORESIST STRIPPER |
| PHOTORESIST STRIPPER |