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Teisinis statusas
Patentas neįsigaliojo (pagal EPK)
(51) | INT.CL. | C11D 3/04 | (2006.01) |
C11D 3/20 | (2006.01) | ||
C11D 3/43 | (2006.01) | ||
C11D 7/10 | (2006.01) | ||
C11D 7/26 | (2006.01) | ||
C11D 7/32 | (2006.01) | ||
C11D 7/50 | (2006.01) | ||
C11D 11/00 | (2006.01) | ||
G03F 7/42 | (2006.01) | ||
C11D 1/62 | (2006.01) | ||
C11D 3/30 | (2006.01) | ||
C11D 3/34 | (2006.01) |
(11) | Patento numeris | 3502225 |
(13) | Dokumento rūšis | T |
(96) | Europos patento paraiškos numeris | 18215456.7 |
Europos patento paraiškos padavimo data | 2018-12-21 | |
(97) | Europos patento paraiškos paskelbimo data | 2019-06-26 |
(45) | Paskelbimo apie Europos patento išdavimą data | 2021-09-01 |
(46) | Apibrėžties vertimo paskelbimo data |
(30) | Numeris | Data | Šalis |
201762609562 P | 2017-12-22 | US | |
201816222248 | 2018-12-17 | US |
(72) |
Richard, Dalton Peters , US
Phenis, Michael T. , US
|
(73) |
Versum Materials US, LLC ,
8555 S. River Parkway, Tempe, AZ 85284,
US
|
(54) | PHOTORESIST STRIPPER |
PHOTORESIST STRIPPER |