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Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/311 | (2006.01) |
| G03F 7/425 | (2013.01) | ||
| G03F 7/42 | (2006.01) | ||
| H01L 21/31133 | (2013.01) |
| (11) | Number of the document | 3537474 |
| (13) | Kind of document | T |
| (96) | European patent application number | 19161776.0 |
| Date of filing the European patent application | 2019-03-09 | |
| (97) | Date of publication of the European application | 2019-09-11 |
| (45) | Date of publication and mention of the grant of the patent | 2023-08-02 |
| (46) | Date of publication of the claims translation |
| (30) | Number | Date | Country code |
| 201916286808 | 2019-02-27 | US |
| (72) |
CAO, Yuanmei , US
PHENIS, Michael T. , US
DALTON, Richard Peters , US
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| (73) |
Versum Materials US, LLC ,
8555 S. River Parkway, Tempe, AZ 85284,
US
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| (54) | PHOTORESIST STRIPPER |
| PHOTORESIST STRIPPER |