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Legal status
Patent not validated
| (51) | INT.CL. | H01L 21/673 | (2006.01) |
| G06Q 10/087 | (2013.01) | ||
| H01L 21/677 | (2006.01) | ||
| H01L 21/67769 | (2013.01) | ||
| G06Q 10/08 | (2012.01) | ||
| H01L 21/67389 | (2013.01) |
| (11) | Number of the document | 3584827 |
| (13) | Kind of document | T |
| (96) | European patent application number | 17896988.7 |
| Date of filing the European patent application | 2017-12-08 | |
| (97) | Date of publication of the European application | 2019-12-25 |
| (45) | Date of publication and mention of the grant of the patent | 2022-02-16 |
| (46) | Date of publication of the claims translation |
| (86) | Number | PCT/JP2017/044163 |
| Date | 2017-12-08 |
| (87) | Number | WO 2018/150698 |
| Date | 2018-08-23 |
| (30) | Number | Date | Country code |
| 2017029122 | 2017-02-20 | JP |
| (72) |
FUJIWARA, Yoshiaki , JP
SANO, Koichi , JP
TOKUMOTO, Mitsuya , JP
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| (73) |
Murata Machinery, Ltd. ,
3 Minami Ochiai-cho
Kisshoin
Minami-ku, Kyoto-shi, Kyoto 601-8326,
JP
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| (54) | PURGE STOCKER |
| PURGE STOCKER |